A nanometer-resolution displacement measurement system based on laser feedback interferometry

@article{Liu2013AND,
  title={A nanometer-resolution displacement measurement system based on laser feedback interferometry},
  author={Huilan Liu and Heming Yao and Lishuang Feng},
  journal={The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year={2013},
  pages={1295-1298}
}
Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling, reconstruction technology is researched and the simulation results… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 15 REFERENCES

H

W. J. Cao, X. Q. Zhang
  • L. Liu, “Signal processing of micro displacement measurement based on laser feedback interference system,” IEEE International Conference on Signal Processing, Communications and Computing, 6061659
  • 2011
VIEW 2 EXCERPTS

D

H. Hao, M. Wang
  • M. Guo, “Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique,” Proc. of SPIE, 7160: 71600W
  • 2009
VIEW 1 EXCERPT

F

Y. G. Yu, J. T. Xi
  • C. Joe “Optical Feedback Self-Mixing Interferometry with a Large Feedback Factor C: Behavior Studies,” IEEE Journal of Quantum Electronics, vol. 45, pp. 840-848
  • 2009
VIEW 1 EXCERPT

L

L. Zhang, S. L. Zhang
  • F. Zhou, “Nanometer-resolution displacement measurement system based on weak feedback effect of dual-frequency laser,” Physics Procedia, vol. 2, pp. 19–26
  • 2009
VIEW 1 EXCERPT

Effect of angle of incidence on self - mixing laser Doppler velocimeter and optimization of the system

D. M. Guo
  • Optics Communications
  • 2008