A nanometer-resolution displacement measurement system based on laser feedback interferometry


Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information… (More)
DOI: 10.1109/NEMS.2013.6559953

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