A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology.

Abstract

This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of… (More)
DOI: 10.1088/0957-4484/23/32/325501

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Cite this paper

@article{Cullinan2012AMM, title={A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology.}, author={Michael A. Cullinan and Robert M. Panas and Martin L. Culpepper}, journal={Nanotechnology}, year={2012}, volume={23 32}, pages={325501} }