A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing


This paper reports a novel monolithic-integrated three-axis convective accelerometer by using a thermopile-embedded curving cantilever for Z-axis sensing. The cantilever down-curving is caused by pneumatic-effect of mutually stress-mismatched two layers. The convective accelerometer consists of a micro heater and several pairs of sensing thermopiles for 3-D… (More)

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