A monolithic inkjet print head: DomeJet

This paper describes a thermally driven monolithic inkjet print head, DomeJet, that consists of dome-shaped ink chambers and thin film nozzle guides. Nozzle guides are fabricated by anisotropic etching after PECVD oxide passivation of their side walls. Each of the ink chambers and channels are fabricated by isotropic dry etching process using XeF/sub 2… (More)