• Corpus ID: 222090764

# A model for atomic precision p-type doping with diborane on Si(100)-2$\times$1

@article{Campbell2020AMF,
title={A model for atomic precision p-type doping with diborane on Si(100)-2\$\times\$1},
author={Quinn Campbell and Jeffrey A. Ivie and Ezra Bussmann and Scott W. Schmucker and Andrew D. Baczewki and Shashank Misra},
journal={arXiv: Materials Science},
year={2020}
}
• Q. Campbell, +3 authors S. Misra
• Published 30 September 2020
• Materials Science, Physics
• arXiv: Materials Science
Diborane (B$_2$H$_6$) is a promising molecular precursor for atomic precision p-type doping of silicon that has recently been experimentally demonstrated [T. {S}kere{ň}, \textit{et al.,} Nature Electronics (2020)]. We use density functional theory (DFT) calculations to determine the reaction pathway for diborane dissociating into a species that will incorporate as electrically active substitutional boron after adsorbing onto the Si(100)-2$\times$1 surface. Our calculations indicate that…

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