• Corpus ID: 222090764

A model for atomic precision p-type doping with diborane on Si(100)-2$\times$1

  title={A model for atomic precision p-type doping with diborane on Si(100)-2\$\times\$1},
  author={Quinn Campbell and Jeffrey A. Ivie and Ezra Bussmann and Scott W. Schmucker and Andrew D. Baczewki and Shashank Misra},
  journal={arXiv: Materials Science},
Diborane (B$_2$H$_6$) is a promising molecular precursor for atomic precision p-type doping of silicon that has recently been experimentally demonstrated [T. {S}kere{ň}, \textit{et al.,} Nature Electronics (2020)]. We use density functional theory (DFT) calculations to determine the reaction pathway for diborane dissociating into a species that will incorporate as electrically active substitutional boron after adsorbing onto the Si(100)-2$\times$1 surface. Our calculations indicate that… 

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