A miniaturized ferrule-top optical cantilever for vibration measurement

@article{Li2017AMF,
  title={A miniaturized ferrule-top optical cantilever for vibration measurement},
  author={Jinheng Li and Shuangzhi Xu and Jing Na Sun and Y. Q. Tang and Feng-zhong Dong},
  journal={2017 25th Optical Fiber Sensors Conference (OFS)},
  year={2017},
  pages={1-4}
}
In this paper, we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibers using laser machining. The polymer cantilever is fabricated by laser micro-machining a sheet of polymer into the required shape and then bonded onto the top of a ceramic ferrule by photo resist as a flat supporting and bonding layer. The dimension of resulting cantilever is ∼1.2 mm long, ∼300 μm wide, and 25 μm thick. In this work we describe the… CONTINUE READING