A microvalve system fabricated by thermoplastic molding

@inproceedings{Fahrenberg1995AMS,
  title={A microvalve system fabricated by thermoplastic molding},
  author={Jochen Fahrenberg and Wilhelm Bier and D. Maas and Wolfgang Menz and Robert Ruprecht and Werner Karl Schomburg},
  year={1995}
}
A process for the fabrication of microvalve systems by thermoplastic molding and membrane techniques has been developed. The valve system consists of three individual valves formed by two parts molded from polymethylmethacrylate PMMA and a polyimide membrane. The mold inserts were manufactured by milling of a brass substrate using a 300 mu m diameter head. The three-dimensional microstructure of the inserts consists of four different levels for valve seats, orifices, alignment pins and cavities… CONTINUE READING

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