A micromachined resonant pressure sensor with DETFs resonator and differential structure

  title={A micromachined resonant pressure sensor with DETFs resonator and differential structure},
  author={Junbo Wang and Deyong Chen and Lei Liu and Zhengwei Wu},
  journal={2009 IEEE Sensors},
A novel micromachined resonant pressure sensor designed with DETFs (double-ended tuning forks) resonant beam and differential structure was put forward in this paper. Three groups of DETFs resonant beams form the differential structure to achieve the better sensitivity and make the sensor free of the environment changes. Four beams with the same size compose the DETFs to improve the Q-factor of the sensor. The structural parameters were optimized through FEM (Finite Elements Method) analysis… CONTINUE READING
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