A micromachined reaction force actuator (RFA) for a nanomanipulator preparation

Abstract

A reaction force actuator (RFA) was fabricated to translate a microstage with nanostep movement, and its performance was experimentally evaluated using an optical fiber based built-in microinterferometer. The proposed RFA consists of a shuttle mass, movable electrode, fixed electrode, springs, and spring anchor, all of which reside on the movable substrate… (More)

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