A microfabricated temperature sensor for hyperthermia

  title={A microfabricated temperature sensor for hyperthermia},
  author={Liwei Lin and Qiang Pei and Jiashan Xu and Hang Guo},
  journal={2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems},
In this paper, we present design and fabrication of a temperature sensor of Pt thin film for real time accurately measuring temperature in tumor hyperthermia. Processing parameters for using magnetron sputtering to deposit Pt thin film are obtained through many trial processes in order to get the excellent thin film surface morphology and sensing performance. With finite element analysis in ANSYS, it confirms that the sensor has a fast dynamic response in two special contact situations between… CONTINUE READING