A microengineered alignment bench for a nanospray ionization source

@article{Syms2007AMA,
  title={A microengineered alignment bench for a nanospray ionization source},
  author={Richard Syms and H. Zou and Max W. Bardwell and M.-A. Schwab},
  journal={Journal of Micromechanics and Microengineering},
  year={2007},
  volume={17},
  pages={1567 - 1574}
}
  • R. SymsH. Zou M. Schwab
  • Published 13 July 2007
  • Physics, Engineering
  • Journal of Micromechanics and Microengineering
A microengineered alignment bench for a nanospray ionization system is described. The bench combines a V-groove mount for a capillary-based nano-ESI source with an extraction electrode and allows accurate axial and transverse alignment of the capillary. An input channel and plenum for nebulizer gas are also demonstrated. The structure is formed in two halves, which are assembled by stacking. Electrically conducting features are constructed by crystal plane etching, deep reactive ion etching and… 

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