A microelectromechanical system for thermomechanical testing of nanostructures

@inproceedings{Chang2013AMS,
  title={A microelectromechanical system for thermomechanical testing of nanostructures},
  author={Tzu-Hsuan Chang and Yudan Zhu},
  year={2013}
}

• Tzu-Hsuan Chang, Yudan Zhu
• Published 2013
• DOI:10.1063/1.4858962

We report an integrated microelectromechanical system (MEMS) with an on-chip heater for in-situ mechanical testing of nanostructures from room to elevated temperatures. Multiphysics simulation is used to predict the temperature distribution in air and vacuum conditions. The temperature simulation in air agrees well with the measurement based on Raman spectroscopy. Mechanical testing of single crystalline silicon nanowires is carried out to investigate the brittle-to-ductile transition… CONTINUE READING

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