A microelectromechanical system for thermomechanical testing of nanostructures

@article{Chang2013AMS,
  title={A microelectromechanical system for thermomechanical testing of nanostructures},
  author={Tzu-Hsuan Chang and Yong Zhu},
  journal={Applied Physics Letters},
  year={2013},
  volume={103},
  pages={263114}
}
  • Tzu-Hsuan Chang, Yong Zhu
  • Published 2013
  • Physics
  • Applied Physics Letters
  • We report an integrated microelectromechanical system (MEMS) with an on-chip heater for in-situ mechanical testing of nanostructures from room to elevated temperatures. Multiphysics simulation is used to predict the temperature distribution in air and vacuum conditions. The temperature simulation in air agrees well with the measurement based on Raman spectroscopy. Mechanical testing of single crystalline silicon nanowires is carried out to investigate the brittle-to-ductile transition… CONTINUE READING
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    References

    SHOWING 1-10 OF 47 REFERENCES
    An electromechanical material testing system for in situ electron microscopy and applications.
    • Y. Zhu, H. Espinosa
    • Materials Science, Medicine
    • Proceedings of the National Academy of Sciences of the United States of America
    • 2005
    • 310
    • PDF
    Mechanical properties of vapor-liquid-solid synthesized silicon nanowires.
    • 278
    • PDF
    Controlled 3D buckling of silicon nanowires for stretchable electronics.
    • 141
    • PDF