A microelectromechanical system for thermomechanical testing of nanostructures

  title={A microelectromechanical system for thermomechanical testing of nanostructures},
  author={Tzu-Hsuan Chang and Yong Zhu},
  journal={Applied Physics Letters},
  • Tzu-Hsuan Chang, Yong Zhu
  • Published 2013
  • Physics
  • Applied Physics Letters
  • We report an integrated microelectromechanical system (MEMS) with an on-chip heater for in-situ mechanical testing of nanostructures from room to elevated temperatures. Multiphysics simulation is used to predict the temperature distribution in air and vacuum conditions. The temperature simulation in air agrees well with the measurement based on Raman spectroscopy. Mechanical testing of single crystalline silicon nanowires is carried out to investigate the brittle-to-ductile transition… CONTINUE READING
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