A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures

@article{Zhu2005AML,
  title={A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures},
  author={Yong Zhu and Nicolaie Moldovan and Horacio Dante Espinosa},
  journal={Applied Physics Letters},
  year={2005},
  volume={86},
  pages={013506}
}
We report on the performance of a microelectromechanical system (MEMS) designed for the in situ electron and x-ray microscopy tensile testing of nanostructures, e.g., carbon nanotubes and nanowires. The device consists of an actuator and a load sensor with a gap in between, across which nanostructures can be placed, nanowelded, and mechanically tested. The load sensor is based on differential capacitance measurements, from which its displacement history is recorded. By determining the sensor… Expand
An electromechanical material testing system for in situ electron microscopy and applications.
  • Yong Zhu, H. Espinosa
  • Materials Science, Medicine
  • Proceedings of the National Academy of Sciences of the United States of America
  • 2005
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