A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures

  title={A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures},
  author={Yong Zhu and Nicolaie Moldovan and Horacio Dante Espinosa},
  journal={Applied Physics Letters},
We report on the performance of a microelectromechanical system (MEMS) designed for the in situ electron and x-ray microscopy tensile testing of nanostructures, e.g., carbon nanotubes and nanowires. The device consists of an actuator and a load sensor with a gap in between, across which nanostructures can be placed, nanowelded, and mechanically tested. The load sensor is based on differential capacitance measurements, from which its displacement history is recorded. By determining the sensor… Expand
An electromechanical material testing system for in situ electron microscopy and applications.
  • Yong Zhu, H. Espinosa
  • Materials Science, Medicine
  • Proceedings of the National Academy of Sciences of the United States of America
  • 2005
A previously undescribed real-time instrumented in situ transmission EM observation of carbon nanotubes failure under tensile load is presented here. Expand
Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization
In situ mechanical characterization of nanostructures, such as carbon nanotubes and metallic nanowires, in scanning and transmission electron microscopes is essential for the understanding ofExpand
Nano-scale testing of nanowires and carbon nanotubes using a microelectromechanical system
The need to characterize nanometer-scale materials and structures has grown tremendously in the past decade. These structures may behave very differently from their larger counterparts and must beExpand
In situ mechanical testing of templated carbon nanotubes
A new microelectromechanical system (MEMS)-based tensile testing stage (with integrated actuator, direct load sensing beam, and electrodes for controlled assembly of an individual nanostructure) wasExpand
In Situ Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages
Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out forExpand
Mechanical Behavior of Individual Micro/Nano-Fibers Using a Novel Characterization Device
The present paper reports the development of a novel mechanical testing device that enables highly reliable mechanical tensile testing on individual micro-/nano-structures. The device featuresExpand
MEMS based nanomechanical testing method with independent electronic sensing of stress and strain
Abstract We report significant improvements in the sensing scheme of a microelectromechanical system (MEMS) based nanomechanical tensile testing technique that has been previously demonstrated toExpand
Mechanical characterization device for in situ measurement of nanomechanical properties of micro/nanostructures
A characterization device was developed for nanomechanical testing on one-dimensional micro/nanostructures. The tool consists of a nanomanipulator, a three-plate capacitive transducer, and associatedExpand
A thermal actuator for nanoscale in situ microscopy testing: design and characterization
This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of aExpand
Multiphysics design and implementation of a microsystem for displacement-controlled tensile testing of nanomaterials
MEMS-based tensile testing devices are powerful tools for mechanical characterization of nanoscale materials. In a typical configuration, their design includes an actuator to deliverExpand


Realization of nanoscale resolution with a micromachined thermally actuated testing stage
The design, fabrication, and characterization of a microelectromechanical systems (MEMS) stress–strain device for testing the mechanical properties of nanomaterials is presented. Thermal actuation,Expand
Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM
Abstract We present a novel tensile testing technique utilizing MEMS force sensors for in situ mechanical characterization of sub-micron scale freestanding thin films in SEM and TEM. MicrofabricationExpand
Controlled placement of an individual carbon nanotube onto a microelectromechanical structure
We report on the precise placement of a single carbon nanotube (CNT) onto a microlectromechanial system (MEMS) structure. Using a hybrid atomic force microscope/scanning electron microscope (AFM/SEM)Expand
Electrostatic deflections and electromechanical resonances of carbon nanotubes
The methods developed here have been applied to a nanobalance for nanoscopic particles and also to a Kelvin probe based on nanotubes, which indicates a crossover from a uniform elastic mode to an elastic mode that involves wavelike distortions in the nanotube. Expand
Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load
The tensile strengths of individual multiwalled carbon nanotubes (MWCNTs) were measured with a "nanostressing stage" located within a scanning electron microscope and a variety of structures were revealed, such as a nanotube ribbon, a wave pattern, and partial radial collapse. Expand
Bending and buckling of carbon nanotubes under large strain
It is shown that multiwalled carbon nanotubes can be bent repeatedly through large angles using the tip of an atomic force microscope, without undergoing catastrophic failure. Expand
Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
This paper describes electrothermal microactuators that generate rectilinear displacements and forces by leveraging deformations caused by localized thermal stresses. In one manifestation, anExpand
Mechanical design and optimization of capacitive micromachined switch
Abstract Design and optimization of a shunt capacitive micromachined switch is presented. The micromachined switch consists of a thin metal membrane called the “bridge” suspended over a centerExpand
Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes
The Young's modulus, strength, and toughness of nanostructures are important to proposed applications ranging from nanocomposites to probe microscopy, yet there is little direct knowledge of theseExpand
Exceptionally high Young's modulus observed for individual carbon nanotubes
CARBON nanotubes are predicted to have interesting mechanical properties—in particular, high stiffness and axial strength—as a result of their seamless cylindrical graphitic structure1–5. TheirExpand