A micro-optical modulation spectroscopy technique for local strain measurement.

Abstract

We provide a high throughput method of performing optical modulation spectroscopy, such as photoreflectance or other spectroscopy techniques which include photoluminescence on a micrometric resolution scale of the order of 10 μm. The spectroscopic technique is designed for strain induced by process in silicon wafers. The optical system is optimized using a… (More)
DOI: 10.1063/1.3569764

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