A micro chemical analyzing system integrated on a silicon wafer

@article{Nakagawa1990AMC,
  title={A micro chemical analyzing system integrated on a silicon wafer},
  author={Shigeru Nakagawa and Shuichi Shoji and Masayoshi Esashi},
  journal={IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.},
  year={1990},
  pages={89-94}
}
The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 mu l/min to 70 mu l/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.<<ETX>> 

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