A metallic microcantilever electric contact probe array incorporated in an atomic force microscope

  • T. Ondarçuhua
  • Published 2000

Abstract

We present the realization and performance of a multiprobe microcontactor made of an array of metallic microcantilevers inserted in an atomic force microscope ~AFM!. This instrument permits simultaneous AFM imaging and electrical characterization of nanoscale devices. It is therefore well adapted for future generations of molecular devices. The probes are 2… (More)

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