A mems-based gas chromatograph front-end for a miniature spectrometer

Abstract

A MEMS-based gas chromatograph (GC) front-end for a mass spectrometer has been developed for space applications. The GC uses Molecular Vapor Deposition (MVD) to achieve a uniform coating of the GC column. Particular attention has been paid to the fluidic connections of the MEMS to the external tubing. 

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