A measurement procedure of technology-related model parameters for enhanced RF-MEMS design

Abstract

The accurate design of Micro-Electro-Mechanical-Systems (MEMS) for Radio Frequency (RF) architectures (e.g., reconfigurable transceivers) relies on suitable models describing the static and, above all, the dynamic electromechanical and electromagnetic behaviour of moveable structures. Such models usually include multiple parameters, whose values depend on… (More)

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Cite this paper

@article{Iannacci2009AMP, title={A measurement procedure of technology-related model parameters for enhanced RF-MEMS design}, author={Jacopo Iannacci and Alena Repchankova and David Macii and Martin Richard Niessner}, journal={2009 IEEE International Workshop on Advanced Methods for Uncertainty Estimation in Measurement}, year={2009}, pages={44-49} }