A low-power 12-bit capacitance-to-digital converter for capacitive MEMS pressure sensor

@article{Kar2011AL1,
  title={A low-power 12-bit capacitance-to-digital converter for capacitive MEMS pressure sensor},
  author={Sagnik Kar and Walter Daniel Leon-Salas},
  journal={2011 IEEE SENSORS Proceedings},
  year={2011},
  pages={1855-1858}
}
A novel low-power capacitance-to-digital converter (CDC) switched-capacitor is presented. The proposed CDC is targeted to work with MEMS capacitive pressure sensors that exhibit a large fixed capacitive component and a small variable capacitive component. The proposed CDC works by subtracting the large fixed capacitive component first and converting to time the remaining capacitance. The time equivalent is then digitized using a counter. The designed CDC consumes 90 µW of power and has a… CONTINUE READING

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