A low-loss quartz-based cross-coupled filter integrated onto low-resistivity silicon

Abstract

This paper presents a 10-GHz cross-coupled bandpass filter integrated onto low-resistivity silicon. The filter is fabricated on a quartz substrate and then mounted onto the silicon using benzocyclobutene and inverted microstrip interconnects. The approach enables the integration of low-loss distributed microwave components onto CMOS-grade Si substrates… (More)

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