A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications

@inproceedings{Kottapalli2011ALC,
  title={A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications},
  author={Ajay Giri Prakash Kottapalli and Chee Wee Tan and Mohammad Olfatnia and Jianmin Miao and George Barbastathis and Michael S. Triantafyllou},
  year={2011}
}
The paper reports the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor for flow rate and flow direction sensing applications. Elaborate experimental testing results demonstrating the sensors' performance as an airflow sensor have been illustrated and validated with theory. MEMS sensors using LCP as a membrane structural material show higher sensitivity and reliability over silicon counterparts. The developed device is highly robust… CONTINUE READING

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