A hybrid approach to low-voltage MEMS switches

  title={A hybrid approach to low-voltage MEMS switches},
  author={R. L. Borwick and P. A. Stupar and J. F. DeNatale},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  pages={859-862 vol.1}
We have fabricated a hybrid MEMS switch that has improved mechanical performance over that of the traditional electrostatic switch. The hybrid switch uses the Lorentz force for actuation and electrostatics for the holding force. A short current pulse is passed along the suspension in the presence of a permanent magnetic field, thereby creating a lateral… CONTINUE READING