A high-resolution microchip optomechanical accelerometer

@inproceedings{Krause2012AHM,
  title={A high-resolution microchip optomechanical accelerometer},
  author={Alexander G. Krause and Martin Winger and Tim D. Blasius and Qiang Lin and Oskar J. Painter},
  year={2012}
}
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics1,2. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive3,4, piezoelectric5, tunnel-current6,7 or optical8–11 methods. Although optical detection provides superior displacement resolution8, resilience to electromagnetic interference and long-range readout7, current… CONTINUE READING
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