A high-resolution microchip optomechanical accelerometer

  title={A high-resolution microchip optomechanical accelerometer},
  author={Alexander G. Krause and Martin Winger and Tim D. Blasius and Qiang Lin and Oskar J. Painter},
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics1,2. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive3,4, piezoelectric5, tunnel-current6,7 or optical8–11 methods. Although optical detection provides superior displacement resolution8, resilience to electromagnetic interference and long-range readout7, current… CONTINUE READING
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Piezoelectric MEMS sensors : stateoftheart and perspectives

  • S. Tadigadapa, K. Mateti
  • Meas . Sci . Technol .
  • 2009

state-of-the-art and perspectives

  • S. Tadigadapa, Mateti, K. Piezoelectric MEMS sensors
  • Meas. Sci. Technol. 20, 092001
  • 2009

In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

  • U Krishnamoorthy
  • Sens. Actuat. A 145–146,
  • 2008

Oil and gas applications : probing oil fields

  • H. Nakstad, J. T. Kringlebotn
  • Nature Photon .
  • 2008

comparing cold damping and cavityassisted cooling schemes

  • C. Genes, D. Vitali, P. Tombesi, S. Gigan, Aspelmeyer, M. Ground-state cooling of a micromechanical oscillator
  • Phys. Rev. A 77, 033804
  • 2008

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