A high-resolution microchip optomechanical accelerometer

@article{Krause2012AHM,
  title={A high-resolution microchip optomechanical accelerometer},
  author={Alexander G. Krause and M. Winger and T. Blasius and Q. Lin and O. Painter},
  journal={Nature Photonics},
  year={2012},
  volume={6},
  pages={768-772}
}
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive, piezo-electric, tunnel-current or optical methods. Although optical detection provides superior displacement resolution, resilience to electromagnetic interference and long-range readout, current optical… Expand

Figures from this paper

An on-chip opto-mechanical accelerometer
Optomechanics For Inertial Sensing
Design and Modification of a High-Resolution Optical Interferometer Accelerometer
...
1
2
3
4
5
...

References

SHOWING 1-10 OF 42 REFERENCES
Quality factors in micron- and submicron-thick cantilevers
Micromachined High-Resolution Accelerometers
A chip-scale integrated cavity-electro-optomechanics platform.
...
1
2
3
4
5
...