A high-resolution microchip optomechanical accelerometer

@article{Krause2012AHM,
  title={A high-resolution microchip optomechanical accelerometer},
  author={Alexander G. Krause and M. Winger and T. Blasius and Q. Lin and O. Painter},
  journal={Nature Photonics},
  year={2012},
  volume={6},
  pages={768-772}
}
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive, piezo-electric, tunnel-current or optical methods. Although optical detection provides superior displacement resolution, resilience to electromagnetic interference and long-range readout, current optical… Expand

Figures from this paper

An on-chip opto-mechanical accelerometer
Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertialExpand
Broadband thermomechanically limited sensing with an optomechanical accelerometer
Acceleration measurement is widely used in commercial, scientific, and defense applications, but the resolution and accuracy achievable for demanding applications is limited by the current technologyExpand
A Chip‐Scale Oscillation‐Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits
High-precision inertial sensing and gravity sensing are key in navigation, oil exploration, and earthquake prediction. In contrast to prior accelerometers using piezoelectric or electronicExpand
Optomechanics For Inertial Sensing
Inertial MEMS (accelerometers and gyroscopes) is a rapidly-growing billion dollar industry. At the heart of these devices is a displacement sensor. Since its commercialization in the 1980s, the coreExpand
Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth
TLDR
A nanomechanical sensor with 80nm bandwidth, displacement imprecision of 45 fm/Hz 1/2 as well as a dynamic range greater than 30 nm with integrated photodetectors is presented. Expand
Design and Modification of a High-Resolution Optical Interferometer Accelerometer
TLDR
A modified micro-grating-based accelerometer is proposed and a new design method to characterize the grating interferometer is introduced, which indicates that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2. Expand
Real-time sensing with multiplexed optomechanical resonators
Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size at the cost of low capture area, making theExpand
Development of a micromachined accelerometer for particle acceleration detection
Abstract We are reporting on the design, fabrication, and experimental results for a micromachiend accelerometer that is intended to be used in the detection of acoustic signals, where the mainExpand
High sensitivity optomechanical reference accelerometer over 10 kHz
We present an optically detected mechanical accelerometer that achieves a sensitivity of 100 ngn/Hz over a bandwidth of 10 kHz and is traceable. We have incorporated a Fabry-Perot fiber-opticExpand
A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
TLDR
This work demonstrates a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechical coupling of 44 GHz/nm or more, for both optical resonance modes. Expand
...
1
2
3
4
5
...

References

SHOWING 1-10 OF 42 REFERENCES
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
Abstract We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some of the most sensitiveExpand
Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution
A new high-sensitivity bulk-silicon-micromachined tunneling accelerometer with micro-g resolution has been successfully fabricated and tested at Stanford University. This accelerometer is a prototypeExpand
Accelerometer systems with self-testable features
Abstract In recent years, substantial effort has been devoted to the design and fabrication of a new class of silicon sensors, the accelerometer. A number of companies have been working in the areaExpand
Measuring nanomechanical motion with an imprecision below that at the standard quantum limit
In the past decade, impressive efforts have been powered in the field of optomechanics that is the study of the coupling between a light field and a mechanical degree of freedom, with the major aimsExpand
A picogram- and nanometre-scale photonic-crystal optomechanical cavity
TLDR
Measurements of an optical system consisting of a pair of specially patterned nanoscale beams in which optical and mechanical energies are simultaneously localized to a cubic-micron-scale volume and for which large per-photon optical gradient forces are realized enable the exploration of cavity optomechanical regimes. Expand
Piezoelectric MEMS sensors: state-of-the-art and perspectives
Over the past two decades, several advances have been made in micromachined sensors and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a clear need for the integrationExpand
Quality factors in micron- and submicron-thick cantilevers
Micromechanical cantilevers are commonly used for detection of small forces in microelectromechanical sensors (e.g., accelerometers) and in scientific instruments (e.g., atomic force microscopes). AExpand
Noise analysis and characterization of a sigma-delta capacitive microaccelerometer
This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g//spl radic/Hz resolution. The accelerometer and interface electronics together operate as aExpand
Micromachined High-Resolution Accelerometers
In this paper, we review the high-resolution, micromachined accelerometers by enunciating the development of their mechanical components, the electronic circuitry and the microfabrication processes.Expand
A chip-scale integrated cavity-electro-optomechanics platform.
TLDR
An integrated optomechanical and electromechanical nanocavity is presented, in which a common mechanical degree of freedom is coupled to an ultrahigh-Q photonic crystal defect cavity and an electrical circuit, to offer a new means to efficiently interconvert weak microwave and optical signals. Expand
...
1
2
3
4
5
...