A high density microchannel network with integrated valves and photodiodes

@article{Baechi2001AHD,
  title={A high density microchannel network with integrated valves and photodiodes},
  author={D. Baechi and J. Dual and Roland Buser},
  journal={Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)},
  year={2001},
  pages={463-466}
}
We have realised a microchannel network with integrated valves, which allows parallel processing of nanoparticles with very high throughput. With the latest prototype, we could show for the first time, that integrated photodiodes are capable of detecting particles moving through the channels. In previous work, we have shown that manipulation of particles is possible. The size of the particles the system is designed for ranges from a few hundred nm to a few microns, which allows using the system… CONTINUE READING

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