A gas chromatographic air analyzer fabricated on a silicon wafer

  title={A gas chromatographic air analyzer fabricated on a silicon wafer},
  author={S. Terry and J. H. Jerman and J. Angell},
  journal={IEEE Transactions on Electron Devices},
  • S. Terry, J.H. Jerman, J. Angell
  • Published 1979
  • Materials Science
  • IEEE Transactions on Electron Devices
  • A miniature gas analysis system has been built based on the principles of gas chromatography (GC). The major components are fabricated in silicon using photolithography and chemical etching techniques, which allows size reductions of nearly three orders of magnitude compared to conventional laboratory instruments. The chromatography system consists of a sample injection valve and a 1.5-m-long separating capillary column, which are fabricated on a substrate silicon wafer. The output thermal… CONTINUE READING
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