A gap-closing electrostatic actuator with a linear extended range

@article{Rivlin2013AGE,
  title={A gap-closing electrostatic actuator with a linear extended range},
  author={Ben Rivlin and S. A. Shmulevich and Inbar Hotzen and David Elata},
  journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)},
  year={2013},
  pages={582-585}
}
We present for the first time a gap-closing electrostatic actuator with a linear extended range. We achieve this by designing a nonlinear spring which exactly counteracts the nonlinear effects of electrostatic attraction forces in gap-closing actuators. We demonstrate this on test devices with an initial gap of g=22μ. The initial response up to a deflection of g/4 is stable and is inevitably nonlinear, but beyond this point we demonstrate good linearity up to a displacement of 85% of the… CONTINUE READING

Citations

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SHOWING 1-9 OF 9 CITATIONS

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  • 2015
VIEW 7 EXCERPTS
CITES BACKGROUND & METHODS
HIGHLY INFLUENCED

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  • 2015

References

Publications referenced by this paper.
SHOWING 1-10 OF 19 REFERENCES

Elata, "Design of nonlinear springs for attaining a linear response in gap-closing electrostatic actuators,

D. B. Rivlin
  • International Journal of Solids and Structures,
  • 2012
VIEW 4 EXCERPTS
HIGHLY INFLUENTIAL

A large-Travel vertical planar actuator with improved stability

  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003

RF MEMS : theory

G. M. Rebeiz
  • design, and technology. Hoboken, N.J.: Wiley-Interscience
  • 2003
VIEW 1 EXCERPT

and M

E. R. Deutsch, J. P. Bardhan, +3 authors M. B. Sinclair
  • A. Butler, "A large-Travel vertical planar actuator with improved stability," Transducers'03, Boston
  • 2003
VIEW 1 EXCERPT

and L

R. Nadal-Guardia, A. Dehe, R. Aigner
  • M. Castaner, "Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point," JMEMS, vol. 11, pp. 255-263
  • 2002
VIEW 1 EXCERPT

Nonlinear springs for increasing the maximum stable deflectionof MEMS electrostatic gap closing actuators," UC Berkeley, http://www-bsac.eecs.berkeley.edu/~pister/245/project/ CortopassiEnglander.pdf

C. Cortopassi, O. Englander
  • 2001
VIEW 1 EXCERPT

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