A fully integrated SOI RF MEMS technology for system-on-a-chip applications

@article{Guan2006AFI,
  title={A fully integrated SOI RF MEMS technology for system-on-a-chip applications},
  author={Lingpeng Guan and J. K. O. Sin and Haitao Liu and Zhibin Xiong},
  journal={IEEE Transactions on Electron Devices},
  year={2006},
  volume={53},
  pages={167-172}
}
In this paper, a silicon-on-insulator (SOI) radio-frequency (RF) microelectromechanical systems (MEMS) technology compatible with CMOS and high-voltage devices for system-on-a-chip applications is experimentally demonstrated for the first time. This technology allows the integration of RF MEMS switches with driver and processing circuits for single-chip communication applications. The SOI high-voltage device (0.7-/spl mu/m channel length, 2-/spl mu/m drift length, and over 35-V breakdown… CONTINUE READING