A flexure-based mechanism and control methodology for ultra-precision turning operation

@inproceedings{Tian2009AFM,
  title={A flexure-based mechanism and control methodology for ultra-precision turning operation},
  author={Yanling Tian and Bijan Shirinzadeh and Da Wei Zhang},
  year={2009}
}
This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration… CONTINUE READING

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