A feed-back control approach for global simulation of high density plasma discharges

Abstract

Spatially averaged global simulations have been widely used to study discharge characteristics of high density plasma discharge, because the global insight on the dependence of quantities such as densities and temperatures can be obtained. Above all, the global model can quickly predict the plasma parameters on the external or the chamber parameters… (More)
DOI: 10.1016/j.cpc.2013.05.002

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