A fast scanning laser probe based on Sagnac interferometer for RF surface and bulk acoustic wave devices


This paper describes the development of a new laser probe for radio frequency (RF) surface and bulk acoustic wave (SAW/BAW) devices. The Sagnac interferometer was introduced for the selective detection of RF vertical motion associated with RF SAW/BAW propagation and vibration. A high-pass characteristic of the interferometer makes the measurement very… (More)

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