A dual axis CMOS frontside bulk micromachined thermal accelerometer


We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central heater creates a hot gas bubble. Acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially… (More)


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