A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

Abstract

This paper introduces the operation concept, fabrication and feasibility of the MEMS digital accelerometer using a microscale liquid-metal (LM) droplet in a microstructured glass channel formed by a photosensitive (PS) glass. Our device employs the advantageous properties of the LM droplet (i.e., high surface tension, high density and electrical conduction… (More)

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@article{Yoo2009ADA, title={A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel}, author={Kwanghyun Yoo and Chan Lee and Joonwon Kim}, journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference}, year={2009}, pages={676-679} }