A comparison of conventional Everhart-Thornley style and in-lens secondary electron detectors: a further variable in scanning electron microscopy.

@article{Griffin2011ACO,
  title={A comparison of conventional Everhart-Thornley style and in-lens secondary electron detectors: a further variable in scanning electron microscopy.},
  author={Brendan J Griffin},
  journal={Scanning},
  year={2011},
  volume={33 3},
  pages={162-73}
}
The secondary electron (SE) imaging of several samples across a range of scanning electron microscopes (SEM) and SE detectors under matched operating conditions has generated a highly variable image data set. Using microanalytical conditions (10-15 kV), images from in-column SE detectors reveal the presence of surface films and contaminants that are… CONTINUE READING