A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines.

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@article{Walter2015ACA, title={A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines.}, author={Peter von Walter and A-C Dippel and Kathrin Pflaum and Josie Wernecke and Jan V van den Hurk and Janet Blume and Uwe Klemradt}, journal={The Review of scientific instruments}, year={2015}, volume={86 5}, pages={053906} }