A chemical sensing microsystem utilizing an adaptive feedback circuit

Abstract

For the first time, a chemical sensor utilizing optical MEMS with a novel adaptive feedback circuit is presented. This circuit implementation of a hill climbing feedback algorithm is capable of autonomously detecting resonant frequency shifts for a range of MEMS resonators. Eight different cantilever-based sensors (width = 0.6–1.4µm, length… (More)

Topics

7 Figures and Tables

Slides referencing similar topics