A capacitive absolute-pressure sensor with external pickoff electrodes

@inproceedings{Park2000ACA,
  title={A capacitive absolute-pressure sensor with external pickoff electrodes},
  author={J Y Park and Yogesh B. Gianchandani},
  year={2000}
}
This paper describes a capacitive absolute-pressure sensor in which the sealed lead transfer is eliminated. The pick-off capacitance is between a flap or skirt-like extension of the flexible diaphragm that reaches past the sealed cavity, and an electrode patterned on the substrate directly below this extension. The sidewall of the cavity is relatively narrow and flexible. Finite-element analysis is used to explore the relevance of various dimensional parameters and to estimate the sensitivity… CONTINUE READING

References

Publications referenced by this paper.
Showing 1-10 of 11 references

A low-cost batch-sealed capacitive pressure sensor

  • Park J-S, B GianchandaniY
  • Proc. IEEE Int. Conf. on Micro Electro Mechanical…
  • 1999
1 Excerpt

A batch-processed vacuum-sealed capacitive pressure sensor

  • A VChavan, K DWise
  • Proc. IEEE Int. Conf. on Solid-State Sensors and…
  • 1997
1 Excerpt

A novel electrostatic servo capacitive vacuum sensor

  • Y Wang, M Esashi
  • Proc. IEEE Int. Conf. on Solid-State Sensors and…
  • 1997
1 Excerpt

Fine grained polysilicon and its application to planar pressure transducers

  • H Guckel, D WBurns, C RRutigliano, D KShowers, J Uglow
  • Proc. IEEE Int. Conf. on Solid-State Sensors and…
  • 1997

Fine grained polysilicon and its application to planar pressure transducers Proc

  • H Guckel, D Burns, C Rutigliano, D Showers, J Uglow
  • 1997

A bulk silicon dissolved wafer process for microelectromechanical devices

  • Y BGianchandani, K Najafi
  • IEEE J. Microelectromech. Syst
  • 1992
2 Excerpts

An ultrasensitive silicon pressure-based microflow sensor

  • S TCho, K Najafi, C ELowman, K DWise
  • IEEE Trans. Electron Devices
  • 1992
1 Excerpt

Bonding techniques for microsensors Micromachining and Micropackaging of Sensors (Amsterdam: Elsevier

  • W HKo, J TSuminto, G JYeh
  • Ko W H, Suminto J T and Yeh G J 1990 Microsensors…
  • 1985
2 Excerpts

Similar Papers

Loading similar papers…