A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

@article{Basset2009ABA,
  title={A batch-fabricated and electret-free silicon electrostatic vibration energy harvester},
  author={P. Basset and D. Galayko and A. M. Paracha and F. Marty and A. Dudka and T. Bourouina},
  journal={Journal of Micromechanics and Microengineering},
  year={2009},
  volume={19},
  pages={115025}
}
This paper presents a novel silicon-based and batch-processed MEMS electrostatic transducer for harvesting and converting the energy of vibrations into electrical energy without using an electret layer. Effective conversion from the mechanical-to-electric domains of 61 nW on a 60 MΩ resistive load, under a vibration level of 0.25 g at 250 Hz, has been demonstrated. Rigorous analysis of the efficiency of the harvester is presented, covering issues related with mechanical and electrical operation… Expand
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