A ball valve micropump in glass fabricated by powder blasting

@inproceedings{Yamahata2005ABV,
  title={A ball valve micropump in glass fabricated by powder blasting},
  author={Christophe Yamahata and Fr{\'e}d{\'e}ric Lacharme and Yves Burri and Martin A M Gijs},
  year={2005}
}
We present the microfabrication and characterization of a ball valve micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ the use of a simple powder blasting technology for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The use of a polymer membrane with embedded permanent magnet gives rise to a large actuation stroke, making the micropump bubble-tolerant and self… CONTINUE READING
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