A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology

  title={A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology},
  author={G. J. Radosavljevic and L. D. Zivanov and Walter Smetana and A. M. Maric and M. Unger and L. Nad},
  journal={IEEE Sensors Journal},
This paper proposes a fully embedded resonant pressure sensor operating in the MHz range and realized in the standard low-temperature co-fired ceramics (LTCC) technology. Buried sensor design and usage of LTCC materials enable application of this sensor in high-temperature and chemically aggressive environments. Upgraded sensor and sensor-antenna models residing on an analytical concept are used for prediction of the system performance. Also, simulation results show that an increase of Young's… CONTINUE READING
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