A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation

  title={A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation},
  author={Yangmin Li and Qingsong Xu},
  journal={IEEE Transactions on Automation Science and Engineering},
This paper reports the design and development processes of a totally decoupled flexure-based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The uniqueness of the proposed XYZ stage lies in that it possesses both input and output decoupling properties with integrated displacement amplifiers. The input decoupling is realized by actuation isolation using double compound parallelogram flexures with large transverse stiffness, and the output decoupling is implemented by… CONTINUE READING
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