A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology

@article{Xu2019ATI,
  title={A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology},
  author={Wei Xu and Bo Wang and Mingzheng Duan and Moaaz Ahmed and Amine Bermak and Yi-Kuen Lee},
  journal={IEEE Sensors Letters},
  year={2019},
  volume={3},
  pages={1-4}
}
This article presents a 3-D integrated molybdenum (Mo) thermoresistive microcalorimetric flow sensor in a 0.18-μm CMOS MEMS technology. The sensor consists of a MEMS structure which is fabricated inside a sealed microchannel and a constant temperature control circuit implemented on the CMOS wafer. The MEMS structure and the CMOS circuit are 3-D integrated at the wafer level. For the N<sub>2</sub> gas flow, the proposed flow sensor achieves a high sensitivity of 0.71 mV/(m/s) and a wide… CONTINUE READING

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