A Thin-Film Piezoelectric Impact Sensor Array Fabricated on a Si Slider for Measuring Head-Disk Inte - Magnetics, IEEE Transactions on


A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length : 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the… (More)


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