A Thin-Film Piezoelectric Impact Sensor Array Fabricated on a Si Slider for Measuring Head-Disk Interaction

@inproceedings{Imai2008ATP,
  title={A Thin-Film Piezoelectric Impact Sensor Array Fabricated on a Si Slider for Measuring Head-Disk Interaction},
  author={Imai and G. J. Burger and T. and J. Peter Lammerink and J. H. J. Fluitman},
  year={2008}
}
A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length : 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted : sensitivity and frequency characteristics, and a flying test over a rotating bump disk. 

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References

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Showing 1-5 of 5 references

Authorized licensed use limited to: UNIVERSITEIT TWENTE

Authorized licensed use limited to: UNIVERSITEIT TWENTE • 2008

Towards a Micromachined Dual Slider and Suspension Assembly for Contact Recording

J A Wickert
Concept of Contact Recording • 1992
View 1 Excerpt

New Method of Detecting Contact between Floating-Head and Disk

T Kita
IEEE Trans. Magn • 1980

Impact excitation of vibration in the acoustic spectral inspection method

Y V Lange
Impact excitation of vibration in the acoustic spectral inspection method • 1979

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