A Temperature Compensation Concept for a Micromachined Film Bulk Acoustic Resonator Oscillator

@article{Zhang2015ATC,
  title={A Temperature Compensation Concept for a Micromachined Film Bulk Acoustic Resonator Oscillator},
  author={Xu Zhang and Wencheng Xu and Junseok Chae},
  journal={IEEE Sensors Journal},
  year={2015},
  volume={15},
  pages={5272-5277}
}
We present a temperature compensation technique of a film bulk acoustic resonator (FBAR)-based oscillator by tuning the supply voltage of the oscillator. The FBAR-based oscillator uses a high-Q FBAR that is made of a thin ZnO piezoelectric film sandwiched by two electrodes. The FBAR is significantly sensitive to temperature change, consequently resulting in large temperature sensitivity of the FBAR-based oscillator. In this paper, we present a temperature compensation technique that improves… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 20 REFERENCES

Low phase noise, FBAR-based voltage controlled oscillator without varactor

  • The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • 2005
VIEW 4 EXCERPTS
HIGHLY INFLUENTIAL

A Temperature-Stable Film Bulk Acoustic Wave Oscillator

  • IEEE Electron Device Letters
  • 2008
VIEW 3 EXCERPTS

Film bulk acoustic resonator at 4.4 GHz with ultra low temperature coefficient of resonant frequency

  • 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.
  • 2005
VIEW 1 EXCERPT

Low phase noise VCSO with diamond SAW resonators

  • Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.
  • 2005
VIEW 1 EXCERPT

Micromachined acoustic wave resonator isolated from substrate.

  • IEEE transactions on ultrasonics, ferroelectrics, and frequency control
  • 2005
VIEW 1 EXCERPT