A Survey of Modeling and Control of Piezoelectric Actuators

@inproceedings{Peng2013ASO,
  title={A Survey of Modeling and Control of Piezoelectric Actuators},
  author={Jingyang Peng and Xiongbiao Chen},
  year={2013}
}
Piezoelectric actuators (PEAs) have been widely used in micro- and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis… CONTINUE READING

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