A Study on Recovery of Silicon Carbide from Silicon Sawing Waste by Hydrocyclone

@inproceedings{Hsu2013ASO,
  title={A Study on Recovery of Silicon Carbide from Silicon Sawing Waste by Hydrocyclone},
  author={Chih-Wei Hsu and Wei-Hao Lee and T. Cheng and Chin-Shan Lin},
  year={2013}
}
In recent years, large amount of hazardous silicon sawing slurry wastes were produced from silicon wafer slicing process for solar cells. It results serious environmental problems and therefore, how to treat/recovery of this wastes become an important issue. The waste slurry mainly contains silicon carbide and silicon. The particle size of SiC and Si are 10… CONTINUE READING