A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

@article{Beyeler2009ASM,
  title={A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution},
  author={Felix Beyeler and Simon Muntwyler and B. J. Nelson},
  journal={Journal of Microelectromechanical Systems},
  year={2009},
  volume={18},
  pages={433-441}
}
This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x-, y-, and z-axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is… CONTINUE READING

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