A Silicon Platform With MEMS Active Alignment Function and Its Potential Application in Si-Photonics Packaging

@article{Zhang2010ASP,
  title={A Silicon Platform With MEMS Active Alignment Function and Its Potential Application in Si-Photonics Packaging},
  author={Q. X. Zhang and Yu Du and C. W. Tan and Jing Bing Zhang and Ming Bin Yu and Wooi Gan Yeoh and Guoqiang Lo and Dim-Lee Kwong},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2010},
  volume={16},
  pages={267-275}
}
A silicon (Si) platform, which consists of passive alignment structures (V-grooves), active microelectromechanical systems (MEMS) alignment components, mechanical locking mechanisms, and predeposited gold-tin soldering pads is developed to address the submicron accuracy assembly requirement of the discrete laser diode (LD) to a small core in-chip Si waveguide (WG). A 2-D in situ active alignment of a ball lens in LD-ball lens-Si-WG coupling system is presented here. The 1550-nm DFB LD and the… CONTINUE READING
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References

Publications referenced by this paper.
Showing 1-10 of 17 references

Design of a bidirectional MEMS actuator with high displacement resolution, large driving force and power-free latching

  • W. Wang, S. Tatic-Lucic, W. L. Brown, R. Vinci
  • Microelectron. Eng., vol. 85, pp. 587–598, 2008.
  • 2008

Precision in-package positioning with a thermal inchworm

  • W. Wang, S. Tatic-Lucic, W. Brown, J. Iceman, S. Hyun, R. Vinci
  • Sens. Actuators A, vol. 142, pp. 316–321, 2008.
  • 2008

Micromachined actuators with braking mechanisms

  • D. Grade, K. Y. Yasumura, H. Jerman
  • Sens. Actuators A, Phys., vol. 122, no. 1, pp. 1…
  • 2005

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