A Silicon Piezoresistive Pressure Sensor

@inproceedings{Singh2002ASP,
  title={A Silicon Piezoresistive Pressure Sensor},
  author={Ranjit Singh and Low Lee Ngo and Ho Soon Seng and Frederick Neo Chwee Mok},
  booktitle={DELTA},
  year={2002}
}
The paper describes the design, simulation and fabrication of a silicon pressure sensor. The device makes use a of monocrystaline silicon square diaphragm supported by a thick silicon rim. The diaphragm is fabricated by etching away the bulk silicon on a defined region until the required thickness is achieved. The sensor makes use of four piezoresistors diffused into the surface of a diaphragm close to the edges. The piezoresistors are arranged in the Wheatstone bridge configuration to achieve… CONTINUE READING

Citations

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